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Izingxenye Ze-Ceramic Ze-Alumina Zenziwe Ngokwezifiso Zemishini Ye-Semiconductor Nezimboni
I-St.Cera ikhiqiza izingxenye ze-ceramic ezenziwe ngokwezifiso kusuka ku-99.8% i-alumina ehlanzekile kakhulu (Al₂O₃) ngokwemidwebo yamakhasimende. Isikhungo sethu sihlonyiswe ngemishini yokugaya enembile kanye nezikhungo zokugaya ze-CNC, okuvumela ukukhiqizwa kwezingxenye ze-ceramic eziyinkimbinkimbi ngokunemba okuphezulu. Izingxenye ezijwayelekile zifaka phakathi ama-insulator, amabhola okuthwala, amasongo okuvala, ama-bushing, izinto ezenziwe ngokwezifiso, kanye nama-geometri ayinkimbinkimbi. Amakhono ethu okukhiqiza ayasekela
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I-Alumina Ceramic Nozzle Yokujova Igesi/Uketshezi Oluphezulu
I-nozzle ye-ceramic kaSt.Cera yenziwe ngokunemba kusuka ku-99.8% i-alumina ehlanzekile kakhulu (Al₂O₃), enikeza ukumelana okuphezulu kokuguguleka (i-Vickers 16 GPa), ukungangeni kwamakhemikhali, kanye nokuqina kokushisa kuze kufike ku-1600°C. Amakhono ethu okusebenza ngokunemba afinyelela ububanzi bangaphakathi obuncane njengo-0.2mm, ngokunemba okungu-0.005mm kanye nokugxila okungu-0.01mm, okuqinisekisa ukugeleza okuhambisanayo kanye nokusatshalaliswa koketshezi/igesi okunembile. I-nozzle ine-bore yangaphakathi ebushelelezi ene-surface finish Ra0.1, enciphisa ukumelana kokugeleza futhi inciphise ukuvaleka. Ububanzi be-orifice busukela ku-0.2mm kuya ku-5.0mm, ngamajiyometri enziwe ngokwezifiso kufaka phakathi ama-outlet aqondile, anciphile, noma ama-orifice amaningi. I-nozzle ngayinye ihlolwa ngokwezilinganiso futhi ihlolwe ukuthi iyafana yini nokugeleza.
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Ipuleti Lokugaya le-Alumina Ceramic Elihlanzekile Kakhulu Lokugoqa Ngokuqondile
Ipuleti lokugaya le-ceramic likaSt.Cera lenziwe nge-alumina ehlanzekile ephezulu engu-99.8% (Al₂O₃) yokusetshenziswa kokufaka nokugaya ngokunembile. Amandla ethu okugaya ngokunembile afinyelela ukuthamba okungu-0.003mm, ukulingana okungu-0.002mm, kanye nokuphela kobuso be-Ra0.1, okuqinisekisa ukususwa kwezinto ezifanayo kulo lonke ubuso bepuleti. Ipuleti linikeza ukumelana okuhle kakhulu kokuguguleka (i-Vickers 16 GPa), amandla aphezulu okuguquguquka (361 MPa), kanye nokuqina kokushisa okufika ku-800°C. Litholakala ngamafomethi ayindilinga afika kububanzi obungu-600mm kanye namapuleti angunxande afika ku-1500mm ubude. Izindawo ezigoqiwe (ububanzi bokufaka obungu-0.5–2.0mm) ziyatholakala ukuze kusatshalaliswe i-slurry ezinqubweni zokufaka. Ipuleti ngalinye lihlolwa nge-interferometer ye-laser futhi linikezwe umbiko wokulinganisa ngokunembile.
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Isiphetho Sokuphela Kwe-Alumina Ceramic Esihlanzekile Kakhulu Samarobhothi Okuphatha I-Wafer
I-St.Cera's alumina ceramic end effector yenziwe ngokunemba kusuka ku-99.8% high-purity Al₂O₃ kusetshenziswa imishini yokugaya ye-CNC ethuthukisiwe ene-axis 5. Amakhono ethu okukhiqiza afaka phakathi imishini yokugaya ngokunemba kanye nezikhungo zokugaya ze-CNC, okuvumela amajiyomethri ayinkimbinkimbi ngokunemba okuphezulu. I-end effector inephrofayili encane (encane njenge-1.5 mm) enomkhawulo ophambili onciphile wokufakwa kwe-wafer ebushelelezi. Izinto zokwakha zinikeza ukuqina okuphezulu (i-Young's modulus 380 GPa), ukumelana okuhle kakhulu kokuguguleka, kanye nokuqina kokushisa okufika ku-800°C. Iyunithi ngayinye ihlanzwe ngokunemba ukuze ifinyelele ukuqina okungu-0.003mm, ukulingana okungu-0.002mm, kanye nokuphela kobuso be-Ra0.1, okuqinisekisa ukuthintana kwe-wafer okuqhubekayo kanye nokusebenza okungenazinhlayiya ezindaweni ze-semiconductor FAB. Itholakala ngobude obusukela ku-150 mm kuya ku-450 mm, ngamajiyomethri e-tip angokwezifiso (i-edge grip, i-Bernoulli, i-flange) kanye nama-flange okufaka ukuze alingane namarobhothi e-OEM. Izinketho zokuqeda umphezulu zifaka phakathi i-lapped, polished, noma i-ESD dissipative coating (10⁶–10⁹ Ω/sq).
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I-Alumina Vacuum Chuck Yokusika Nokugaya Ngokuqondile
I-St.Cera's alumina vacuum chuck yenziwe nge-99.8% high-purity Al₂O₃ ene-vacuum grooves enziwe ngomshini oqondile. Amandla ethu okugaya ngokunemba afinyelela ubucaba obungu-0.003mm kanye nokulingana okungu-0.002mm, okuqinisekisa ukuqina kwe-wafer engenama-warp ngesikhathi sokusika, ukugaya ngemuva, kanye nokuhlolwa. Izinto zinikeza amandla aphezulu okugoba (361 MPa), ubulukhuni (16 GPa), kanye nokuqina kokushisa okufika ku-800°C. Itholakala ngamafomethi ayindilinga afika ku-600mm ububanzi bangaphandle (OD) kanye nezimo eziyisikwele ezifika ku-1500mm ubude. I-vacuum grooves yakhelwe ngokwezifiso (amaphethini agxilile, aqondile, noma ama-grid) ukuze ivumelane nezidingo ezithile zenqubo. I-chuck ngayinye ihlolwa nge-laser interferometer futhi inikezwe umbiko wokuqinisekisa ubucaba.
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I-Vacuum Chuck ye-SiC enezimbobo Enensimbi Yokuphatha I-Wafer Egobile Nencane
I-St.Cera's metal based ceramic vacuum chuck ihlanganisa ungqimba lwe-ceramic olunezimbobo ze-silicon carbide (SiC) nesisekelo sensimbi esenziwe ngomshini oqondile (i-aluminium noma insimbi engagqwali). Izinto ze-SiC ezinezimbobo (oluhlaza okwesibhakabhaka-omnyama, izimbobo ezingu-35–40%, usayizi we-pore 20–30 μm, ukuvuleka okungu-60 ml/cm²·min) zinikeza ukusatshalaliswa kwe-vacuum okufanayo, okumnene kulo lonke ubuso be-wafer, kususa ukumakwa komphetho futhi kuvumela ukwesekwa okungenakuthintana kwama-wafer amancane (≤100 μm) noma asontekile. Ungqimba lwe-SiC lunikeza ukwanda okuphansi kokushisa (3.5×10⁻⁶/℃), ukuzinza kokushisa kufika ku-1000°C, kanye namandla okuguquguquka aphakathi (32–35 MPa). Isisekelo sensimbi sengeza ukuqina kwesakhiwo, ukufakwa kalula ngezimbobo ezinezintambo, kanye nokuvikelwa ekuqhekekeni okuqhekekile. Le chuck ilungele ukugaya ngemuva, ukunquma, kanye nokucubungula i-wafer yokushisa okuphezulu lapho i-vacuum efanayo kanye nokuhambisana kokushisa kubalulekile.
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Ipuleti le-Ceramic le-Alumina elihlanzekile kakhulu – lokufaka izinto zokuvikela ukushisa kanye nokushisa okuphezulu
Ipuleti lika-ceramic likaSt.Cera lenziwe nge-alumina engu-99.8% ehlanzekile kakhulu (Al₂O₃), enikeza amandla aphezulu e-dielectric (15×10⁶ V/m), ukuzinza kokushisa kufika ku-1600°C, kanye nokumelana okuhle kakhulu nokuguguleka. Amapuleti ahlanganiswe ngokunemba ukuze afinyelele ukuthamba okungu-≤5 μm ngaphezu kuka-100 mm kanye nokungagugi kobuso okungu-Ra ≤0.4 μm. Itholakala ngobukhulu obujwayelekile kusukela ku-1 mm kuya ku-20 mm, osayizi abangokwezifiso kufika ku-500×500 mm. Isetshenziswa njengezivikeli zikagesi, izisekelo ze-heater, ama-chamber liners, kanye nama-vacuum chuck substrates.
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Induku Yendawo Ye-Alumina Ceramic Eqondile Yezinto Zokulungisa Ama-Semiconductor
Induku yendawo ye-ceramic yaseSt.Cera isuselwe ku-99.8% ye-alumina ehlanzekile kakhulu (Al₂O₃). Inikeza ubulukhuni obuphezulu (16 GPa), ukumelana okuhle kakhulu nokuguguleka, kanye nokuqina kobukhulu. Ubukhulu bokubekezelelana buqinile njengo-±0.005 mm, ubude bufika ku-150 mm. Ubuso benduku buhlanganiswe ku-Ra ≤0.2 μm ukuze kufakwe futhi kususwe kahle. Isetshenziswa njengezikhonkwane zokuqondisa, izikhonkwane ze-dowel, noma izitobhi zokubeka ezindaweni zokulungisa izinqubo ze-semiconductor, amakhasethi e-wafer, kanye nemishini yokuhlola.
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Induku Yesitsha Yesitsha Ye-Zirconia Enamandla Aphezulu – Yezingcezu Zokujikijela Nokubhoboza Okuqondile
Induku ye-ceramic ye-zirconia kaSt.Cera isuselwe ku-ZrO₂ eqiniswe yi-yttria. Inikeza amandla angavamile okugoba (1000 MPa), ukuqina kokuphuka (5–8 MPa·m¹/²), kanye nobunzima be-Vickers (13 GPa). Induku inokubukeka okumnyama noma okumhlophe, ubuningi obungu-6.03 g/cm³, kanye nokugoba okungenalutho. Ububanzi busuka ku-1 mm kuya ku-50 mm, ubude bufika ku-200 mm, nokubekezelela okuqinile njengo-±0.005 mm. Ukuphela kwendawo kufinyelele ku-Ra ≤0.2 μm. Kufanelekile ukusetshenziswa okugugile njenge-plunger, i-shafts, ama-dowel pins, kanye nezikhala zamathuluzi okusika.
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Izingxenye Ze-Ceramic Eziqiniswe Yi-Yttria Zirconia – Ukuqina Okuphezulu Nokumelana Nokugqokwa
I-St.Cera ikhiqiza izingxenye ze-ceramic ze-zirconia ezenziwe ngokwezifiso isebenzisa i-yttria-stabilized ZrO₂ (Y-TZP). Lezi zinto zinikeza amandla angavamile okugoba (1000 MPa), ukuqina kokuphuka okuphezulu (5–8 MPa·m¹/²), kanye nobunzima be-Vickers obungu-13 GPa. Ubuningi bungu-6.03 g/cm³, ngaphandle kokumuncwa kwamanzi. Izingxenye zinganikezwa ngombala omhlophe noma omnyama. Indlela yokuqinisa uguquko eyingqayizivele ye-Zirconia inikeza ukumelana okuhle kakhulu nokusabalala kokuqhekeka, okwenza kube kuhle kakhulu ezingxenyeni ezithintekayo, ukushaqeka kokushisa, noma ukucindezeleka okuphezulu. Izingxenye ezijwayelekile zifaka izihlalo zamavalvu, ama-plunger epompo, amaphini okuqondisa i-fiber, amathuluzi okusika, kanye nama-bushings angagugi.
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Izingxenye ze-Ceramic ze-Alumina ze-ST.CERA ezenziwe ngokwezifiso ze-99.5%
Izingxenye zesakhiwo se-ceramic yigama elijwayelekile lezimo ezahlukahlukene eziyinkimbinkimbi zezingxenye ze-ceramic. Zenziwe nge-powder ye-ceramic emsulwa kakhulu, izingxenye ze-ceramic zakhiwa ngokucindezela okomile noma ukucindezela okubandayo kwe-isostatic, bese zishiswa ngaphansi kokushisa okuphezulu, bese zishiswa ngomshini oqondile. Zisetshenziswa kabanzi emishinini ye-semiconductor, ekuxhumaneni kwe-optical, e-laser, emishinini yezokwelapha, e-petroleum, e-metallurgy, ezimbonini ze-elekthronikhi ezinezici zayo ezifana nokumelana nokushisa okuphezulu, ukumelana nokugqwala, ukumelana nokuklwebheka kanye nokushisa.
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Izingxenye ze-Ceramic ze-Alumina ze-ST.CERA ezenziwe ngokwezifiso ze-99.5%
Izingxenye zesakhiwo se-ceramic yigama elijwayelekile lezimo ezahlukahlukene eziyinkimbinkimbi zezingxenye ze-ceramic. Lisetshenziswa kabanzi emishinini ye-semiconductor, ekuxhumaneni kwe-optical, e-laser, emishinini yezokwelapha, e-petroleum, e-metallurgy, ezimbonini ze-elekthronikhi ezinezici zalo ezifana nokumelana nokushisa okuphezulu, ukumelana nokugqwala, ukumelana nokuklwebheka kanye nokushisa.
