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Isiphetho Sokuphela Kwe-Alumina Ceramic Esihlanzekile Kakhulu Samarobhothi Okuphatha I-Wafer
I-St.Cera's alumina ceramic end effector yenziwe ngokunemba kusuka ku-99.8% high-purity Al₂O₃ kusetshenziswa imishini yokugaya ye-CNC ethuthukisiwe ene-axis 5. Amakhono ethu okukhiqiza afaka phakathi imishini yokugaya ngokunemba kanye nezikhungo zokugaya ze-CNC, okuvumela amajiyomethri ayinkimbinkimbi ngokunemba okuphezulu. I-end effector inephrofayili encane (encane njenge-1.5 mm) enomkhawulo ophambili onciphile wokufakwa kwe-wafer ebushelelezi. Izinto zokwakha zinikeza ukuqina okuphezulu (i-Young's modulus 380 GPa), ukumelana okuhle kakhulu kokuguguleka, kanye nokuqina kokushisa okufika ku-800°C. Iyunithi ngayinye ihlanzwe ngokunemba ukuze ifinyelele ukuqina okungu-0.003mm, ukulingana okungu-0.002mm, kanye nokuphela kobuso be-Ra0.1, okuqinisekisa ukuthintana kwe-wafer okuqhubekayo kanye nokusebenza okungenazinhlayiya ezindaweni ze-semiconductor FAB. Itholakala ngobude obusukela ku-150 mm kuya ku-450 mm, ngamajiyomethri e-tip angokwezifiso (i-edge grip, i-Bernoulli, i-flange) kanye nama-flange okufaka ukuze alingane namarobhothi e-OEM. Izinketho zokuqeda umphezulu zifaka phakathi i-lapped, polished, noma i-ESD dissipative coating (10⁶–10⁹ Ω/sq).
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Isiphetho se-ST.CERA esenziwe ngokwezifiso se-Alumina Ceramic Bernoulli
Njengomkhiqizi ohamba phambili we-ceramic End Effector / Handling Arm, sithuthukise i-End Effector / Handling Arm engajwayelekile ephendula izidingo zaleyo makethe. I-Bernoulli's Principle-based ceramic End Effector / Handling Arm engakwazi ukuhambisa i-wafer ngokusebenzisa umoya ngaphandle kokuthintana okulinganiselwe.
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Isiphetho se-ESD Ceramic esenziwe ngokwezifiso se-ST.CERA
Njengoba inezici zokumelana nokushisa okuphezulu, ukumelana nokugqwala, ukumelana nokuklwebheka kanye nokushisa, i-ceramic ingasebenza ezinhlotsheni eziningi zemishini yokukhiqiza ye-semiconductor enesimo sokushisa okuphezulu, igesi ye-vacuum noma egqwalisayo isikhathi eside.
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Isiphetho sokubamba se-Alumina Ceramic esenziwe ngokwezifiso se-ST.CERA
Njengoba inezici zokumelana nokushisa okuphezulu, ukumelana nokugqwala, ukumelana nokuklwebheka kanye nokushisa, i-ceramic ingasebenza ezinhlotsheni eziningi zemishini yokukhiqiza ye-semiconductor enesimo sokushisa okuphezulu, igesi ye-vacuum noma igesi egqwalisayo isikhathi eside.
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Isiphetho sethreyi ye-Alumina Ceramic esenziwe ngokwezifiso se-ST.CERA
Lena i-ceramic efana ne-treyi End Effector / Handling Arm esetshenziswa ngaphansi kwe-vacuum condition.
I-Ceramic End Effector / Handling Arm "imelana nokushisa kakhulu", "ayiphambuki kakhulu", futhi "ilula" ngesisindo uma iqhathaniswa neyensimbi.
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Isiphetho sokuphela kwe-vacuum se-ST.CERA esenziwe ngokwezifiso se-Alumina Ceramic
Njengoba inezici zokumelana nokushisa okuphezulu, ukumelana nokugqwala, ukumelana nokuklwebheka kanye nokushisa, i-ceramic ingasebenza ezinhlotsheni eziningi zemishini yokukhiqiza ye-semiconductor enesimo sokushisa okuphezulu, igesi ye-vacuum noma igesi egqwalisayo isikhathi eside.
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I-ST.CERA Alumina Ceramic End Effector eyenziwe ngokwezifiso
I-ST.CERA inikeza i-ESD coating kanye ne-ESD ceramic material. I-End Effector. Yenziwe nge-alumina powder ehlanzekile kakhulu, icutshungulwa ngokucindezela okubandayo kwe-isostatic, i-sintering yokushisa okuphezulu kanye nokuqedwa ngokunemba, ingafinyelela ukubekezelela ubukhulu ku-±0.001 mm, ukuqeda kobuso ku-Ra 0.1, ukumelana nokushisa ku-1600℃.
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I-ST.CERA eyenziwe ngokwezifiso i-Alumina Ceramic Vacuum End Effector
Lena i-ceramic efana ne-treyi End Effector / Handling Arm esetshenziswa ngaphansi kwe-vacuum condition.
I-Ceramic End Effector / Handling Arm "imelana nokushisa kakhulu", "ayiphambuki kakhulu", futhi "ilula" ngesisindo uma iqhathaniswa neyensimbi.
Njengoba inezici zokumelana nokushisa okuphezulu, ukumelana nokugqwala, ukumelana nokuklwebheka kanye nokushisa, i-ceramic ingasebenza ezinhlotsheni eziningi zemishini yokukhiqiza ye-semiconductor enesimo sokushisa okuphezulu, igesi ye-vacuum noma igesi egqwalisayo isikhathi eside.
Yenziwe ngempuphu ye-alumina emsulwa kakhulu, icutshungulwa ngokucindezela okubandayo kwe-isostatic, ukuthungwa kokushisa okuphezulu kanye nokuqedwa ngokunemba, ingafinyelela ukubekezelela ubukhulu kufike ku-±0.001 mm, ukuqeda kobuso i-Ra 0.1, ukumelana nokushisa okungu-1600℃.
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Ukuphathwa kwe-Wafer ye-Alumina Ceramic End Effector eyenziwe ngokwezifiso ye-ST.CERA
I-ST.CERA inikeza i-ESD coating kanye ne-ESD ceramic material End Effector / Handling Arm ene-hole channel eyakhelwe ngaphakathi. Singochwepheshe enkambisweni eyakha i-vacuum air channel ngaphakathi kwento eyodwa ngaphandle kokusebenzisa i-glue.
Akukho bungozi bokungcola, ukuphuma kwegesi, noma izinhlayiya. I-vacuum End Effector / Handling Arm ye-ST.CERA enobuchwepheshe obukhethekile bokumboza imbozwa ngogesi. Singaphinde sinikeze izinto ze-ceramic ze-ESD ezimbozwa ngogesi ngaphandle kokumbozwa.
Yenziwe ngempuphu ye-alumina emsulwa kakhulu, icutshungulwa ngokucindezela okubandayo kwe-isostatic, ukuthungwa kokushisa okuphezulu kanye nokuqedwa ngokunemba, ingafinyelela ukubekezelela ubukhulu kufike ku-±0.001 mm, ukuqeda kobuso i-Ra 0.1, ukumelana nokushisa okungu-1600℃. -
Izingxenye Zemishini Ye-Alumina Ceramic End Effector Semiconductor
Vimbela izinhlayiya ezingavela emaphethelweni aqondile noma aqondile kanye nobuso bangemuva ngenkathi ama-wafer ethuthwa noma ethintana ne-End Effector / Handling Arm.
Kwabaqondisi, kwamukelwe izinto ezithambile ezingalimazi i-wafer.
Ukuncishiswa kungenzeka ngobuchwepheshe besiteshi se-vacuum esakhelwe ngaphakathi se-ST.CERA obungasebenzisi izinamathiseli.
Kungenzeka ukwenza izimbobo zokufaka nokushintsha ubude nobubanzi besisekelo lapho i-End Effector / Handling Arm ifakwe khona kurobhothi.
Izinzwa zokukhweza, izikulufo kanye namabhuleki kuyatholakala njengenketho.
Yakhelwe ukusetshenziswa emoyeni.
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Umshini We-CNC Owenziwe Ngokwezifiso we-St.Cera Ceramic End Effector
I-ST.CERA inikeza i-vacuum ceramic End Effector / Handling Arm enesiteshi esingenalutho esakhelwe ngaphakathi. Singochwepheshe enkambisweni eyakha isiteshi somoya esingenalutho ngaphakathi kwento eyodwa ngaphandle kokusebenzisa ingcina.
Akukho bungozi bokungcola, ukuphuma kwegesi, noma izinhlayiya. I-vacuum End Effector / Handling Arm ye-ST.CERA enesiteshi esakhelwe ngaphakathi ihlala isikhathi eside futhi ingasetshenziswa emazingeni okushisa aphezulu. Ngaphezu kwalokho, izindleko zethu zokukhiqiza zingancishiswa ngokuqeda ukuhlanganiswa okungadingekile.
Yenziwe ngempuphu ye-alumina emsulwa kakhulu, icutshungulwa ngokucindezela okubandayo kwe-isostatic, ukuthungwa kokushisa okuphezulu kanye nokuqedwa ngokunemba, ingafinyelela ukubekezelela ubukhulu kufike ku-±0.001 mm, ukuqeda kobuso i-Ra 0.1, ukumelana nokushisa okungu-1600℃.
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I-Alumina Anti-Static Ceramic End Effector
Njengoba inezici zokumelana nokushisa okuphezulu, ukumelana nokugqwala, ukumelana nokuklwebheka kanye nokushisa, i-ceramic ingasebenza ezinhlotsheni eziningi zemishini yokukhiqiza ye-semiconductor enesimo sokushisa okuphezulu, igesi ye-vacuum noma igesi egqwalisayo isikhathi eside.
Yenziwe ngempuphu ye-alumina emsulwa kakhulu, icutshungulwa ngokucindezela okubandayo kwe-isostatic, ukuthungwa kokushisa okuphezulu kanye nokuqedwa ngokunemba, ingafinyelela ukubekezelela ubukhulu kufike ku-±0.001 mm, ukuqeda kobuso i-Ra 0.1, ukumelana nokushisa okungu-1600℃.
