Isiphetho Sokuphela Kwe-Alumina Ceramic Esihlanzekile Kakhulu Samarobhothi Okuphatha I-Wafer
I-St.Cera's alumina ceramic end effector yenziwe ngokunemba kusuka ku-99.8% high-purity Al₂O₃ kusetshenziswa imishini yokugaya ye-CNC ethuthukisiwe ene-axis 5. Amakhono ethu okukhiqiza afaka phakathi imishini yokugaya ngokunemba kanye nezikhungo zokugaya ze-CNC, okuvumela amajiyomethri ayinkimbinkimbi ngokunemba okuphezulu. I-end effector inephrofayili encane (encane njenge-1.5 mm) enomkhawulo ophambili onciphile wokufakwa kwe-wafer ebushelelezi. Izinto zokwakha zinikeza ukuqina okuphezulu (i-Young's modulus 380 GPa), ukumelana okuhle kakhulu kokuguguleka, kanye nokuqina kokushisa okufika ku-800°C. Iyunithi ngayinye ihlanzwe ngokunemba ukuze ifinyelele ukuqina okungu-0.003mm, ukulingana okungu-0.002mm, kanye nokuphela kobuso be-Ra0.1, okuqinisekisa ukuthintana kwe-wafer okuqhubekayo kanye nokusebenza okungenazinhlayiya ezindaweni ze-semiconductor FAB. Itholakala ngobude obusukela ku-150 mm kuya ku-450 mm, ngamajiyomethri e-tip angokwezifiso (i-edge grip, i-Bernoulli, i-flange) kanye nama-flange okufaka ukuze alingane namarobhothi e-OEM. Izinketho zokuqeda umphezulu zifaka phakathi i-lapped, polished, noma i-ESD dissipative coating (10⁶–10⁹ Ω/sq).
Imininingwane (isekelwe ku-99.8% Al₂O₃kanye namakhono okukhiqiza eSt.Cera):
| Impahla | Inani |
| Izinto | I-Alumina engu-99.8% (Ivory) |
| Ubuningi | 3.93 g/cm³ |
| Amandla Okugobeka | 361 MPa |
| Ukuqina kukaVickers | 16 GPa |
| I-Modulus kaYoung | 380 GPa |
| Ukuthamba | 0.003mm |
| Ukufana | 0.002mm |
| Ukuqedwa Komphezulu | I-Ra0.1 (egoqwe/epholishiwe) |
| Izinga Lokushisa Eliphezulu Lokusebenza | 800°C |
| Ibanga Lobude | 150–450 mm |
Izicelo:
- · Ukudluliselwa kwe-wafer kumarobhothi angenawo umoya kanye nawasemoyeni
- · Ama-effector okugcina e-automation e-FAB wama-wafer angu-200mm/300mm
- · Ukuphathwa kwe-wafer encane (ngenketho ye-ESD)
Amakhono Okukhiqiza:
Imishini yethu yokugaya ngokunemba kanye nezikhungo zokugaya ze-CNC zivumela ukukhiqizwa kwezingxenye ze-ceramic eziyinkimbinkimbi ezine:
- · Ubude obukhulu bomshini wokugaya: 1500mm
- · Ububanzi obukhulu bangaphandle: 600mm
- · Ububanzi obuncane bangaphakathi: 0.2mm
- · Ubukhulu obukhulu: 100mm
Ikhwalithi yokulawula:
Ukuqondakala okungu-0.005mm, ukugoba okungu-0.005mm, ukuzungeza okungu-0.002mm, ukufana okungu-0.002mm, ukugxila okungu-0.01mm kuqinisekiswe yi-CMM. Iyunithi ngayinye ihlanzwa nge-ultrasonic futhi igumbi lokuhlanza le-Class 100 lipakishwe.
