I-Alumina Vacuum Chuck Yokusika Nokugaya Ngokuqondile
I-St.Cera's alumina vacuum chuck yenziwe nge-99.8% high-purity Al₂O₃ ene-vacuum grooves enziwe ngomshini oqondile. Amandla ethu okugaya ngokunemba afinyelela ubucaba obungu-0.003mm kanye nokulingana okungu-0.002mm, okuqinisekisa ukuqina kwe-wafer engenama-warp ngesikhathi sokusika, ukugaya ngemuva, kanye nokuhlolwa. Izinto zinikeza amandla aphezulu okugoba (361 MPa), ubulukhuni (16 GPa), kanye nokuqina kokushisa okufika ku-800°C. Itholakala ngamafomethi ayindilinga afika ku-600mm ububanzi bangaphandle (OD) kanye nezimo eziyisikwele ezifika ku-1500mm ubude. I-vacuum grooves yakhelwe ngokwezifiso (amaphethini agxilile, aqondile, noma ama-grid) ukuze ivumelane nezidingo ezithile zenqubo. I-chuck ngayinye ihlolwa nge-laser interferometer futhi inikezwe umbiko wokuqinisekisa ubucaba.
Imininingwane (isekelwe ku-99.8% Al₂O₃kanye namakhono okukhiqiza eSt.Cera):
| Impahla | Inani |
| Izinto | I-Alumina engu-99.8% (Ivory) |
| Ubuningi | 3.93 g/cm³ |
| Amandla Okugobeka | 361 MPa |
| Ukuqina kukaVickers | 16 GPa |
| Ububanzi Bangaphandle (ubuningi) | 600mm |
| Ubukhulu (ubuningi) | 100mm |
| Ubude (ubuningi) | 1500mm |
| Ukuthamba | 0.003mm |
| Ukufana | 0.002mm |
| Ukuqedwa Komphezulu | I-Ra0.1 |
| Izinga Lokushisa Eliphezulu Lokusebenza | 800°C |
Izicelo:
- · Ukusika nokubhala i-wafer (200mm/300mm nangaphezulu)
- · Ukugaya ama-wafer amancane ngemuva
- · Ukuhlolwa nokuphenya kwamehlo
- · Ukuphathwa okukhulu kwe-substrate
Ukunemba Kokukhiqiza:
- · Ukuqonda: 0.005mm
- · Ukuma okuqondile: 0.005mm
- · Ubuyindilinga: 0.002mm
- · Ukugxila: 0.01mm
