I-Alumina-Based Standard Vacuum Chuck – Ukuqina Okuphezulu Komshini Oqondile
Le chuck ye-vacuum esekwe ku-alumina yenziwe nge-99.8% Al₂O₃, inikeza indawo ebushelelezi engenazimbobo enamaphethini e-vacuum groove angokwezifiso. Inikeza ukuqina okumangalisayo (i-modulus kaYoung engu-380 GPa) kanye nokuba flat (≤3 μm), okwenza kube kuhle kakhulu ekugayeni ngokunembile, ukugoqa, kanye nokuhlukanisa ama-wafer e-semiconductor kanye nezingxenye ze-optical. Ukushisa okuphezulu kwale nto (32 W/m·k) kuqinisekisa ukufana kwezinga lokushisa ngesikhathi sokucubungula.
Imininingwane(kusekelwe ku-99.8% Al₂O₃):
| Impahla | Inani |
| Izinto | I-Alumina engu-99.8% (Ivory) |
| Ubuningi | 3.93 g/cm³ |
| Amandla Okugobeka | 361 MPa |
| Ukuqina kukaVickers | 16 GPa |
| I-Modulus kaYoung | 380 GPa |
| Ukuqhuba Okushisayo | 32 W/m·k |
| Ukuthamba | ≤3 μm (ngaphezu kuka-200mm) |
| Ubulukhuni Bomphezulu (uhlangothi lwe-chuck) | URa ≤0.4 μm |
| Izinga Lokushisa Eliphezulu Lokusebenza | 800°C |
Izicelo:
- · Ukugaya i-wafer ngemuva (iqinile futhi ithambile)
- · Ukusika ngokunembile izinto ezibuthakathaka
- · Ukuhlanganisa izisekelo ze-ceramic
- · Ukupholisha ilensi yokukhanya
Ukukhiqiza:
Ukugoqa okunembile kwezinhlangothi zombili → ukugoqa idayimane (ongakukhetha) → ukuzungeza umphetho → ukuhlanza nge-ultrasonic → ukuhlolwa kokuthamba okungu-100% nge-laser interferometer.
Aizinzuzo:
- · Ukusekelwa okuqinile kunciphisa ukuphambuka ngaphansi komthwalo
- · Akukho ukukhiqizwa kwezinhlayiya kusuka esakhiweni esinezimbobo
- · Kulula ukuyihlanza (iyahambisana nesihlanzi se-solvent)
- · Imigoqo ye-vacuum engenziwa ngezifiso (egxile, eqondile, amaphethini enziwe ngokwezifiso)
Osayizi Abatholakalayo:
Isiyingi: 100mm, 150mm, 200mm, 300mm; isikwele/unxande uma ucela.
Siphinde sinikeze izinguqulo ezisekelwe ensimbi ukuze kube namandla aphezulu omshini.
