I-High-Purity Alumina Ceramic Core ye-Semiconductor Fixtures
I-St.Cera's alumina ceramic core yenziwe ngokunemba okuvela ku-99.8% high-purity Al₂O₃, enikeza amandla e-dielectric ahlukile (15×10⁶ V/m), ukuzinza kokushisa kuze kufike ku-1600°C, kanye nokumelana nokuqhekeka ngaphansi komthwalo. Lawa ma-core asetshenziswa njengezingxenye zesakhiwo ezisekelweni zenqubo yokushisa okuphezulu, izisekelo ze-heater, ama-plasma chamber liners, kanye nama-insulators kagesi. Ubulukhuni obuphezulu bezinto (16 GPa) kanye nokumuncwa kwamanzi okuphansi (0%) kuqinisekisa ukuthembeka kwesikhathi eside ezindaweni ezinzima.
Imininingwane(kusekelwe ku-99.8% Al₂O₃):
| Impahla | Inani |
| Izinto | I-Alumina engu-99.8% (Ivory) |
| Ubuningi | 3.93 g/cm³ |
| Amandla Okugobeka | 361 MPa |
| Ukuqina Kokuphuka | 3–4 MPa·m¹/² |
| Ukuqina kukaVickers | 16 GPa |
| I-Modulus kaYoung | 380 GPa |
| Ukuqhuba Okushisayo | 32 W/m·k |
| Ukwanda Kokushisa (25-1000°C) | 7.2×10⁻⁶/℃ |
| Amandla e-Dielectric | 15×10⁶ V/m |
| Ukumelana Okuqondile | >10¹⁴ Ω·mm²/m |
| Izinga Lokushisa Eliphezulu Lokusebenza | 1600°C |
Izicelo:
- · I-Heater core yama-reactor epitaxial
- · I-liner yegumbi le-plasma kanye namapuleti okumboza
- · Izivikeli zikagesi ezinamandla aphezulu
- · Isisekelo sezinto zokwakha zamarobhothi okuphatha i-wafer
Ukukhiqiza:
Ukucindezela kwe-isostatic → i-machining eluhlaza → i-sintering ku-1600°C → i-CNC grinding kuze kube yizilinganiso zokugcina (± 0.01 mm tolerance). Ingqikithi ngayinye ihlolwa yi-CMM kanye nokutholwa kwamaphutha e-ultrasonic.
Ukuqinisekisa ikhwalithi:
Isitifiketi se-ISO 9001:2015. Ukuhlolwa kokungena kwedayi kokuqhekeka kobuso; ukuhlolwa kwamandla e-dielectric ngokwe-ASTM D149.
Aizinzuzo ngaphezu kwezinye izinto zobumba:
- · Amandla aphezulu e-dielectric kune-zirconia (15 vs <10×10⁶ V/m)
- · Izindleko eziphansi kune-SiC yezinhlelo zokusebenza ezingezona eze-plasma
- · Ukumelana okuhle kakhulu kwamakhemikhali nama-halogens (ngaphandle kwe-HF)
Izimo Ezingokwezifiso:
Amasilinda, imigoqo eyisikwele, amapuleti, noma amajiyometri ayinkimbinkimbi. Usayizi wesici okungenani u-0.5 mm.
Xhumana nathi ukuze uthole imiklamo eyinhloko eyenziwe ngokwezifiso kanye nokusekelwa kokulingisa ukushisa.
