Isiphetho Sokuphela Se-Ceramic Esimbozwe Nge-Teflon – Indawo Enganamatheli Yokuphatha I-Wafer Ebucayi
I-St.Cera's Teflon (PTFE) embozwe nge-ceramic end effector ihlanganisa i-substrate ye-alumina enamandla aphezulu ne-PTFE embozwe ngendlela efanayo, ephansi (ukujiya okungu-15–30 μm). I-coating inikeza i-coefficient ephansi kakhulu yokungqubuzana (≤0.1), ukumelana okuhle kwamakhemikhali, kanye nezakhiwo ezinganamatheli, ivimbela ukunamathela kwe-wafer futhi isuse ukungcola kwangemuva. I-substrate ye-ceramic engaphansi (99.8% Al₂O₃) inikeza amandla aphezulu okugoba (361–1000 MPa), ukumelana nokuguguleka, kanye nokuqina kokushisa okufika ku-260°C (umkhawulo wokumboza). Le effector end ilungele ukuphatha ama-wafer athambile, amancane, noma anamathelayo (isb., ngemuva kokumbozwa kwe-photoresist noma izinqubo zamakhemikhali).
Imininingwane (kusekelwe ku-99.8% Al₂O₃ substrate ene-PTFE coating):
| Impahla | Inani |
| Izinto Ezingaphansi Kwesakhiwo | I-Alumina engu-99.8% (Ivory) |
| Izinto Zokumboza | I-PTFE (i-Teflon) |
| Ubukhulu Bokumboza | 15–30 μm |
| I-Coefficient of Friction (Embozwe) | ≤0.1 |
| Amandla Okugobeka Kwe-Substrate (Al₂O₃) | 361 MPa |
| Ukuqina kwe-Substrate (Al₂O₃) | 16 GPa |
| Ubuningi be-Substrate | 3.93 g/cm³ |
| Izinga Lokushisa Eliphezulu Lokusebenza (umkhawulo wokumboza) | 260°C |
| Ubulukhuni Bomphezulu (ngaphambi kokumboza) | URa ≤0.4 μm |
| Amandla e-Dielectric (i-substrate) | 15×10⁶ V/m |
Qaphela: Ukugqoka kwe-PTFE kunciphisa izinga lokushisa eliphezulu ku-260°C; uma kusetshenziswa izinga lokushisa eliphezulu, cabanga nge-ceramic engagqokwanga noma ezinye izingubo.
Izicelo:
- · Ukuphatha ama-wafers ngemva kokugqoka i-photoresist (izindawo ezinamathelayo)
- · Ukudluliselwa kwama-wafer amancane noma abuthakathaka (kuvimbela ukunamathela)
- · Ukuhlolwa kwe-semiconductor kanye namathuluzi okukala izilinganiso
- · Ukuzenzakalela kwegumbi lokuhlanza lapho ukungcola kwezinhlayiya kufanele kuncishiswe khona
Inqubo Yokukhiqiza:
I-ceramic substrate eqoshiwe futhi ecacile → ukugoba kobuso (i-plasma etch noma i-grit blast) → I-PTFE spray coating → ukushisa okushisa ku-380°C → ukuhlolwa kokugcina. Isiphetho ngasinye sihlolwa ukujiya kwe-coating (i-eddy current), ukunamathela (ukuhlolwa kwe-cross-cut ASTM D3359), kanye ne-coefficient of friction.
Ikhwalithi yokulawula:
Ukuhlolwa okubonakalayo okungu-100% kwemigodi noma amabhamuza; ukufana kobukhulu be-coating ngaphakathi kuka-±5 μm; akukho ukuhlukanisa ngemva kokuhlolwa kokugoba okungu-90° kukhuphoni lofakazi. Ukuhlolwa kobukhulu bokubekezelelana kwe-OEM (ubude ±0.05 mm, ukuthamba ≤0.1 mm).
Izinzuzo ngaphezu kwe-Uncoated noma ezinye i-Coatings:
- · Indawo enganamatheli ivimbela ukunamathela nokuphuka kwe-wafer
- · I-coefficient ephansi kakhulu yokungqubuzana phakathi kokumbozwa kwe-ceramic
- · Ukumelana okuhle kakhulu kwamakhemikhali (ama-asidi, izisekelo, izinyibilikisi)
- · Kunciphisa ukukhiqizwa kwezinhlayiya ngokuvimbela ukudluliswa kwezinto
Imikhawulo (amazwana ngokuphambuka kwezinto ezibonakalayo):
Isembozo se-PTFE asitholakali kumathebula ezakhiwo zezinto ezibonakalayo anikeziwe (Al₂O₃, ZrO₂, Si₃N₄, BeO). Izakhiwo ze-substrate zilandela ngokuqinile ishidi ledatha elinikeziwe (99.8% Al₂O₃). Izakhiwo zesembozo zisekelwe ezicacisweni ze-PTFE ezijwayelekile embonini, njengoba kungekho datha yesembozo enikeziwe. Kuzinhlelo zokusebenza ezingaphezu kuka-260°C, kunconywa i-end effector ye-ceramic engagqokwanga.*
Ukwenza ngokwezifiso:
Itholakala ngobude obungu-150–1500 mm, izimo ze-tip (i-edge grip, i-Bernoulli, i-flange flat), amaphethini e-flange okufakwayo ngomdwebo ngamunye we-OEM. I-coating engaphelele (izindawo zokuthintana kuphela) noma i-cover egcwele i-optional.
Cela isampula ukuze kuhlolwe ukunamathela kanye nokushayisana.
