Ipuleti le-Ceramic le-Alumina Elikhulu Le-Semiconductor kanye Nezimo Zezimboni
I-St.Cera ikhiqiza amapuleti e-ceramic amakhulu avela ku-99.8% i-alumina ehlanzekile ephezulu (Al₂O₃) enobukhulu obuphezulu obufika ku-1500mm ubude kanye nobubanzi obungu-600mm. Amakhono ethu okugaya ngokunemba afinyelela ubucaba obungu-0.003mm ngaphezu kuka-100mm kanye nokulingana okungu-0.002mm, okuqinisekisa ikhwalithi yendawo ehambisanayo yezinhlelo zokusebenza zendawo enkulu. Ubukhulu bufika ku-100mm, ukuqeda kwendawo kuya ku-Ra0.1. Lawa mapuleti asebenza njengezisekelo ze-vacuum chuck, ama-heater platens, amaphaneli okushisa kagesi, kanye nezitezi zegumbi lokucubungula ekukhiqizweni kwe-semiconductor, ukubonisa, kanye ne-photovoltaic. Kutholakala imigodi edlulayo, ama-counterbores, kanye ne-edge profile.
Imininingwane (isekelwe ku-99.8% Al₂O₃kanye namakhono okukhiqiza eSt.Cera):
| Impahla | Inani |
| Izinto | I-Alumina engu-99.8% (Ivory) |
| Ubuningi | 3.93 g/cm³ |
| Amandla Okugobeka | 361 MPa |
| Ukuqina kukaVickers | 16 GPa |
| Amandla e-Dielectric | 15×10⁶ V/m |
| Ubude Obuphezulu | 1500mm |
| Ububanzi Obukhulu | 600mm |
| Ubukhulu Obukhulu | 100mm |
| Ukuthamba (ngo-100mm) | 0.003mm |
| Ukufana | 0.002mm |
| Ukuqedwa Komphezulu | I-Ra0.1 (egoqwe/epholishiwe) |
| Izinga Lokushisa Eliphezulu Lokusebenza | 1600°C |
Izicelo:
- · Amapuleti esisekelo se-vacuum chuck ama-wafer amakhulu namaphaneli
- · Ama-heater platen emishini yokucubungula ukushisa
- · Amaphaneli okushisa kagesi ezinhlelweni ze-voltage ephezulu
- · Ukucubungula phansi kwegumbi kanye namapuleti e-liner
Ukunemba Kokukhiqiza:
Ukuqonda: 0.005mm, ukuthambekela: 0.005mm, kuqinisekiswe nge-laser interferometer.
Izinzuzo ngaphezu kwamapuleti ensimbi:
- · Akukho ukungcoliswa kwensimbi - kubalulekile ezinqubweni ze-semiconductor
- · Akukho ugesi ophumayo – ilungele izindawo zokuhlanza umoya
- · Ukumelana nokuguguleka okuphezulu kanye nokumelana namakhemikhali
Ukwenza ngokwezifiso:
Amaphethini emigodi enziwe ngokwezifiso, amaphrofayili onqenqema, izindawo ezinezitebhisi, kanye nezindawo zokufaka ezenziwe ngensimbi ziyatholakala.
