Iphini Lokusekela Le-Ceramic Lokulungiswa Kwenqubo Ye-Semiconductor
Amaphini okusekela e-St.Cera's ceramic (aziwa nangokuthi amaphini okuphakamisa noma amaphini okusekela) asetshenziswa emakamelweni enqubo ye-semiconductor ukuphakamisa ama-wafer noma ama-substrate ngesikhathi sokuphatha, ukufudumala, noma ukupholisa. Akhiqizwa nge-99.8% alumina noma i-silicon nitride, la maphini anikeza amandla aphezulu okucindezela, ukuzinza kokushisa, kanye nokumelana namakhemikhali. Umklamo we-hemispherical noma we-flat tip uvimbela ukuklwebheka kwe-wafer.
Imininingwane(I-Alumina 99.8%):
| Impahla | Inani |
| Izinto | 99.8% Al₂O₃ noma i-Si₃N₄ |
| Ubude | 10 – 100 mm |
| Ububanzi | 1 – 10 mm |
| Isimo Sethiphu | Isicaba, sinohlangothi oluphezulu, siqondile |
| Amandla Okucindezela (Al₂O₃) | >2000 MPa |
| Izinga Lokushisa Eliphezulu Lokusebenza (Al₂O₃) | 1600°C |
| Ukuqedwa Komphezulu | I-Lapped (Ra ≤0.4 μm) |
| Ukubekezelelana kububanzi | ±0.01 mm |
Izicelo:
Izikhonkwane zokuphakamisa emakamelweni e-CVD/PVD
Izikhonkwane zokusekela zokubhaka i-hotplate
Izakhiwo zokusekela amakhadi e-probe
Izisekelo zesikebhe se-quartz furnace
Ukukhiqiza:
Ukugaya okunembile okungenasisekelo kwe-OD → ukugaya idayimane kwephrofayili yethiphu → ukuhlanza nge-ultrasonic → ukuhlolwa okungu-100%.
Ikhwalithi yokulawula:
I-CMM yobude/ububanzi, i-optical comparator ye-tip radius, ukuhlolwa komthwalo ukuqinisekisa amandla okucindezela (isampula engahleliwe nge-lot ngayinye). Akukho ukungcola kwe-ferromagnetic (kuqinisekiswe nge-magnet).
Izinzuzo ngaphezu kwezikhonkwane zensimbi noma ze-quartz:
Isikhathi sokuphila isikhathi eside kahlanu kunensimbi engagqwali
Akukho ukungcoliswa kwensimbi ekamelweni lenqubo
Amandla okushisa aphezulu kune-quartz (1600°C vs 1100°C)
Ubuso obunganamatheli (ukunamathela kwezinhlayiya okuncishisiwe)
Ukwenza ngokwezifiso:
Amaphrofayili amaningi aneziqongo, isisekelo esinezintambo, noma umgodi ocijile.
Siphinde sinikeze amaphini e-SiC ezindaweni ezibucayi ze-plasma.
