Ipuleti Lokusabalalisa Igesi Le-Alumina le-CVD/PVD Showerhead
Ipuleti lokusabalalisa igesi likaSt.Cera (i-showerhead) lenziwe ngomshini oqondile kusuka ku-99.8% alumina ceramic ehlanzekile kakhulu. Linohlu lwemigodi emincane (ububanzi obungu-0.3–1.5 mm) eqinisekisa ukugeleza kwegesi okufanayo phezu kobuso be-wafer ngesikhathi sezinqubo ze-CVD, PVD, noma ze-ALD. Amandla aphezulu e-dielectric epuleti (>15×10⁶ V/m) kanye nokumelana ne-plasma kwenza kube yinto ebalulekile ekufakweni kwefilimu encane ye-semiconductor.
Imininingwane:
| Impahla | Inani |
| Izinto | 99.8% Al₂O₃ noma i-SiC |
| Ububanzi | 100 – 1500mm (eyindilinga) noma engunxande |
| Ubukhulu | 5 – 20 mm |
| Ububanzi bembobo | 0.3 – 1.5 mm |
| Iphethini Yembobo | Ngokwezifiso (unxantathu, isikwele, i-radial) |
| Ukuthamba | ≤10 μm endaweni egcwele |
| Ubulukhuni Bomphezulu | URa ≤0.6 μm (uhlangothi lwegesi) |
| Isilinganiso Sendawo Evulekile | 5–15% |
Izicelo:
Amapuleti eshawa e-PECVD
Ama-injector egesi e-ALD
Amapuleti okusabalalisa igesi ekamelweni lokusika
Izingxenye ze-reactor ze-MOCVD
Ukukhiqiza:
I-substrate ye-Alumina egobile ithambekele → Ukubhoboza kwe-CNC ngamathuluzi ambozwe ngedayimane (ukubekezelela isikhundla sembobo ±0.02 mm) → ukususa amabhomu → ukuhlanza nge-ultrasonic → ukupakisha kwe-Class 100.
Ikhwalithi yokulawula:
Ipuleti ngalinye lihlolwa ngokuphelele ngobukhulu bembobo (uhlelo lokubona), ukuba yisicaba (i-laser interferometer), kanye nokufana kokugeleza kwegesi (imephu yokucindezela). Akukho mifantu emincane ngaphansi kwe-microscope izikhathi ezingu-20.
Izinzuzo ngaphezu kwamapuleti ensimbi:
Akukho ukungcola kwensimbi kumafilimu amancane
Ukukhiqizwa kwezinhlayiya eziphansi (akukho zinhlayiya zokugqwala)
Imelana nama-plasma okuhlanza anamandla (CF₄, NF₃)
Izici Zenziwe Ngokwezifiso:
Iziteshi zegesi ezingemuva, imigodi ebhobozekile, izivalo zomphetho, kanye namazinga ahlukene ezinto (i-SiC yokuqhuba ukushisa okuphezulu, i-Y₂O₃ coating yokumelana ne-plasma).
Sihlinzeka ngokuqinisekiswa kwe-CAD kanye nokulingisa ukugeleza ngaphambi kokukhiqiza.
