I-Porous Ceramic Vacuum Chuck Yokuphatha I-Wafer Egobile
I-chuck ye-ceramic enezimbobo ye-St.Cera yakhiwe nge-alumina ehlanzekile kakhulu enezimbobo ezivulekile ezifanayo ezingama-30–45% kanye nosayizi we-pore osukela ku-10 kuya ku-100 μm. Ngokungafani nama-chuck avamile anezimbobo, ubuso obunezimbobo buhlinzeka nge-vacuum esatshalaliswe kuyo yonke i-wafer ngemuva, ibamba ngempumelelo ama-wafer asontekile, amancane, noma ahlanganisiwe ngaphandle kokuphakanyiswa noma ukuphuka komphetho. I-vacuum emnene (elungisekayo nge-restrictor) nayo ivimbela ukumaka ngemuva.
Imininingwane(kusekelwe ku-99.6% Al₂O₃):
| Impahla | Inani |
| Ukubhoboka | 30–45% |
| Usayizi Wembobo Emaphakathi | 10–100 μm (okungakhethwa) |
| Amandla Okugobeka | ≥250 MPa |
| Ubude (ngaphezu kuka-300mm) | ≤5 μm |
| Ukuqedwa Komphezulu | I-Lapped (Ra 0.8 μm) |
| Izinga Eliphezulu Lokushaja I-Vacuum | -80 kPa |
| Izinga Lokusebenza | 400°C (umoya), 600°C (ongaqinile) |
| Izinto | 99.6% Al₂O₃, ZrO₂, noma i-SiC |
Izicelo:
Isigayo esincane (≤50 μm) ngemuva
Ukufakwa kwe-wafer egobile ukuze kunqunywe
Ukuqoqwa kwedayi elihlanganisiwe kusuka kutheyiphu
Ukuphathwa kwephaneli yengilazi
Ukukhiqiza kanye nekhwalithi:
Impuphu ye-ceramic exutshwe nama-organic pore formers → icindezelwe → i-sintered → ihlanganiswe kuze kube ugqinsi lokugcina. I-chuck ngayinye ihlolwa ukugeleza kwayo ukuze ithole ukufana kwe-vacuum (≤5% deviation) futhi ihlolwe ukuze kutholakale ukusatshalaliswa kosayizi we-pore (SEM). Ukuthamba kulinganiswa nge-laser interferometer.
Izinzuzo ngaphezu kwama-Grooved Chucks:
Akukho ukumaka komphetho we-wafer noma ukushintsha kwe-die
Ibamba ama-wafer asontekile (kufika ku-500 μm bow)
Iqeda ukuvaleka kwemigodi ye-vacuum
Ukusekelwa kokuzilinganisa kwezingxenye ezincane
Ukwenza ngokwezifiso:
Izimo eziyindilinga noma eziyisikwele, ezinobukhulu obufika ku-600 mm. Singafaka izindandatho zokuvala ezinqenqemeni noma izingxenye ze-vacuum ze-zone. Izinguqulo ezisekelwe ngensimbi ziyatholakala ngezidingo zokuqina okuphezulu.
Cela isampula yosayizi we-wafer yakho kanye nokuhlolwa kwe-warpage.
