I-Alumina Vacuum Chuck engu-12-Inch Yokucubungula I-Wafer engu-300mm
I-vacuum chuck kaSt.Cera engamasentimitha angu-12 yenziwe ngokunemba kusuka ku-99.8% high-purity alumina (Al₂O₃) yokuphatha i-wafer engu-300mm. I-chuck inendawo egobile kahle (ububanzi be-groove obungu-0.5–1.0 mm, i-pitch engu-2–3 mm) ukuqinisekisa ukusatshalaliswa kwe-vacuum okufanayo kuyo yonke ububanzi obungu-300mm. Ukuthamba kugcinwa ngaphakathi kwama-5 μm, okuvumela ukuqina kwe-wafer engenama-warp ngesikhathi sokusika, ukugaya ngemuva, nokuhlolwa. Amandla aphezulu okugoba (361 MPa) kanye nobunzima (16 GPa) kuqinisekisa ukuzinza kwesikhathi eside ngisho nangaphansi kwemijikelezo ye-vacuum ephindaphindwayo.
Imininingwane (kusekelwe ku-99.8% Al₂O₃):
| Impahla | Inani |
| Ububanzi | 300 mm (12 intshi) |
| Izinto | I-Alumina engu-99.8% (Ivory) |
| Ubuningi | 3.93 g/cm³ |
| Amandla Okugobeka | 361 MPa |
| Ukuqina kukaVickers | 16 GPa |
| Ubude (ngaphezu kuka-300mm) | ≤5 μm |
| Ububanzi Bomsele | 0.5–1.0 mm |
| Izinga Lokushisa Eliphezulu Lokusebenza | 800°C |
| Amandla e-Dielectric | 15×10⁶ V/m |
Izicelo:
Ukusika nokubhala i-wafer engu-300mm
Ukugaya ngemuva kwe-wafer (ukusekela kwe-wafer encane)
Ukuhlolwa nokuphenywa kwe-optical
Ama-chuck okubopha/ukususa izibopho zesikhashana
Ukukhiqiza:
I-CNC igayiwe futhi yahlanganiswa yaze yaba yisicaba ekugcineni, yafakwa amasondo edayimane, yahlanzwa nge-ultrasonic, futhi yapakishwa egumbini lokuhlanza le-Class 100. I-chuck ngayinye ihlolwa ngokuphelele ukuthi iyisicaba (i-laser interferometer) kanye nokujula kwe-groove (i-profilometer).
Izinzuzo:
Ukukhiqizwa kwezinhlayiya okuphansi (izinhlayiya ezingu-≤0.05/cm²)
Amakhemikhali awasebenzi ezinyibilikisini kanye nama-asidi
Umphezulu ophephile we-ESD (ukumelana >10¹³ Ω·cm)
Amaphethini emigodi ye-vacuum eyenziwe ngokwezifiso kanye namachweba angemuva ayatholakala.
