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Imishini Ye-Semiconductor Eyenziwe Ngokwezifiso ye-ST.CERA Ama-Ceramic Chucks
Njengoba zakheke ngokucindezela okubandayo kwe-isostatic futhi zishiswe ngaphansi kokushisa okuphezulu, bese zishiswa ngomshini futhi zipholishwe ngokunemba, izingxenye ezisele ze-ceramic zingahlangabezana nanoma yiziphi izidingo eziqinile zemishini ye-semiconductor ngezici zayo zokumelana nokuguguleka, ukumelana nokugqwala, ukwanda okuphansi kokushisa, kanye nokushisa. I-ceramics ingasebenza ezinhlotsheni eziningi zemishini yokukhiqiza ye-semiconductor enesimo sokushisa okuphezulu, i-vacuum noma igesi egqwalisayo isikhathi eside.
Yenziwe ngempuphu ye-alumina emsulwa kakhulu, icutshungulwa ngokucindezela okubandayo kwe-isostatic, ukuthungwa kokushisa okuphezulu kanye nokuqedwa ngokunemba, ingafinyelela ukubekezelela ubukhulu kufike ku-±0.001 mm, ukuqeda kobuso i-Ra 0.1, ukumelana nokushisa okungu-1600℃.
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Izingxenye Ezisele Ze-Ceramic Zemishini Yokuhlola I-Semiconductor
Njengoba zakheke ngokucindezela okubandayo kwe-isostatic futhi zishiswe ngaphansi kokushisa okuphezulu, bese zishiswa ngomshini futhi zipholishwe ngokunemba, izingxenye ezisele ze-ceramic zingahlangabezana nanoma yiziphi izidingo eziqinile zemishini ye-semiconductor ngezici zayo zokumelana nokuguguleka, ukumelana nokugqwala, ukwanda okuphansi kokushisa, kanye nokushisa. I-ceramics ingasebenza ezinhlotsheni eziningi zemishini yokukhiqiza ye-semiconductor enesimo sokushisa okuphezulu, i-vacuum noma igesi egqwalisayo isikhathi eside.
Yenziwe ngempuphu ye-alumina emsulwa kakhulu, icutshungulwa ngokucindezela okubandayo kwe-isostatic, ukuthungwa kokushisa okuphezulu kanye nokuqedwa ngokunemba, ingafinyelela ukubekezelela ubukhulu kufike ku-±0.001 mm, ukuqeda kobuso i-Ra 0.1, ukumelana nokushisa okungu-1600℃.
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Izingxenye ze-Ceramic ze-Alumina ezihlanzekile kakhulu zezicelo ze-Semiconductor nezezimboni
I-St.Cera ikhiqiza izingxenye ze-ceramic ze-alumina ezisebenza ngokunemba (Al₂O₃) ngokwezidingo zamakhasimende. Isebenzisa i-alumina engu-99.8% ehlanzekile kakhulu, lezi zingxenye zinikeza amandla amahle kakhulu okugoba (361 MPa), ubulukhuni obuphezulu (16 GPa), kanye namandla aphezulu e-dielectric (15×10⁶ V/m). Yakhelwe imishini ye-semiconductor, izinhlangano ezingagugi, ama-insulator kagesi, kanye nezinto zokushisa okuphezulu, le nto inikeza ukumuncwa kwamanzi okucishe kube yi-zero (0%) kanye ne-coefficient yokukhulisa ukushisa engu-7.2×10⁻⁶/℃, okuqinisekisa ukuzinza kobukhulu ngaphansi kwezimo ezimbi kakhulu.
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Iphini Lokusekela Le-Ceramic Lokulungiswa Kwenqubo Ye-Semiconductor
Amaphini okusekela e-St.Cera's ceramic (aziwa nangokuthi amaphini okuphakamisa noma amaphini okusekela) asetshenziswa emakamelweni enqubo ye-semiconductor ukuphakamisa ama-wafer noma ama-substrate ngesikhathi sokuphatha, ukufudumala, noma ukupholisa. Akhiqizwa nge-99.8% alumina noma i-silicon nitride, la maphini anikeza amandla aphezulu okucindezela, ukuzinza kokushisa, kanye nokumelana namakhemikhali. Umklamo we-hemispherical noma we-flat tip uvimbela ukuklwebheka kwe-wafer.
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I-High-Purity Alumina Ceramic Core ye-Semiconductor Fixtures
I-St.Cera's alumina ceramic core yenziwe ngokunemba okuvela ku-99.8% high-purity Al₂O₃, enikeza amandla e-dielectric ahlukile (15×10⁶ V/m), ukuzinza kokushisa kuze kufike ku-1600°C, kanye nokumelana nokuqhekeka ngaphansi komthwalo. Lawa ma-core asetshenziswa njengezingxenye zesakhiwo ezisekelweni zenqubo yokushisa okuphezulu, izisekelo ze-heater, ama-plasma chamber liners, kanye nama-insulators kagesi. Ubulukhuni obuphezulu bezinto (16 GPa) kanye nokumuncwa kwamanzi okuphansi (0%) kuqinisekisa ukuthembeka kwesikhathi eside ezindaweni ezinzima.
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I-ST.CERA Yenzelwe Indandatho Ye-Alumina Ceramic kanye ne-Ceramic Disc
Njengoba zakheke ngokucindezela okubandayo kwe-isostatic futhi zishiswe ngaphansi kokushisa okuphezulu, bese zishiswa ngomshini futhi zipholishwe ngokunemba, izingxenye ezisele ze-ceramic zingahlangabezana nanoma yiziphi izidingo eziqinile zemishini ye-semiconductor ngezici zayo zokumelana nokuguguleka, ukumelana nokugqwala, ukwanda okuphansi kokushisa, kanye nokushisa. I-ceramics ingasebenza ezinhlotsheni eziningi zemishini yokukhiqiza ye-semiconductor enesimo sokushisa okuphezulu, i-vacuum noma igesi egqwalisayo isikhathi eside.
Yenziwe ngempuphu ye-alumina emsulwa kakhulu, icutshungulwa ngokucindezela okubandayo kwe-isostatic, ukuthungwa kokushisa okuphezulu kanye nokuqedwa ngokunemba, ingafinyelela ukubekezelela ubukhulu kufike ku-±0.001 mm, ukuqeda kobuso i-Ra 0.1, ukumelana nokushisa okungu-1600℃.
