Izingxenye ze-Ceramic ze-Alumina eziphephile ze-ESD zokuphathwa kwe-Wafer ebucayi neqinile
Izingxenye ze-alumina eziphephile ze-St.Cera's ESD (electrostatic discharge) zenziwe nge-99.8% ye-Al₂O₃ ehlanzekile kakhulu enokumelana okulungiselelwe ubuso okungu-10⁶–10⁹ Ω/sq, okufezwa ngenqubo yokwelapha noma yokumboza. Lezi zingxenye zisusa ngempumelelo ukushaja okuqinile, zivimbela ukulimala kwe-electrostatic kuma-wafers e-semiconductor abucayi namadivayisi. Izinto eziyisisekelo zigcina amandla azo aphezulu okugoba (361 MPa), ubulukhuni (16 GPa), kanye namandla e-dielectric (15×10⁶ V/m). Izingxenye ze-ceramic eziphephile ze-ESD zifaka phakathi ama-end effectors, ama-lift pins, ama-guide rails, kanye nezinto ezenziwe ngokwezifiso zokwenza i-FAB automation.
Imininingwane(ngokusekelwe ku-99.8% Al₂O₃ ngokwelashwa kwe-ESD):
| Impahla | Inani |
| Izinto Eziyisisekelo | I-Alumina engu-99.8% |
| Ukumelana Nomphezulu (ESD) | 10⁶–10⁹ Ω/skwele |
| Ubuningi | 3.93 g/cm³ |
| Amandla Okugobeka | 361 MPa |
| Ukuqina kukaVickers | 16 GPa |
| I-Modulus kaYoung | 380 GPa |
| Ukwanda Kokushisa (25-1000°C) | 7.2×10⁻⁶/℃ |
| Izinga Lokushisa Eliphezulu Lokusebenza | 800°C |
| Amandla e-Dielectric (ngobuningi) | 15×10⁶ V/m |
Qaphela: Ukumelana nomphezulu we-ESD akuhlinzekiwe kumathebula ezakhiwo zezinto ezibonakalayo ezinikeziwe. Uhla olungenhla luyindinganiso yemboni yezinto zobumba ezilahlayo. Sicela usithinte ukuze uthole imibiko yokuhlolwa.
Izicelo:
● Ama-effector aphephile e-ESD okudlulisa i-wafer
● Izikhonkwane zokumisa kanye nezinto ze-ESD emishinini ye-FAB
● Hlola amasokhethi amadivayisi azwela ngokungaguquki
● Amathuluzi okuhlanza lapho ukulawula okungaguquki kubalulekile khona
Ukukhiqiza kanye nekhwalithi:
Ukucutshungulwa kwe-alumina okujwayelekile + ukwelashwa kwendawo ye-ESD → ukumelana kwendawo kulinganiswa ngokwe-ANSI/ESD STM11.11. Ingxenye ngayinye ihlolwa ngo-100% nge-electrode yendandatho eqondile.
Izinzuzo:
● Kuvimbela ukulahlekelwa kwesivuno okuhlobene ne-ESD
● Igcina amandla okusebenza kwe-ceramic kanye nokumelana namakhemikhali
● Akukho ukukhiqizwa kwezinhlayiya ezivela ekukhishweni okungaguquki
