Indandatho Yophawu Lwe-Alumina Ceramic Ehlanzekile Kakhulu Yokuvalwa Kwegumbi Eliphezulu Lokushisa
Indandatho yokuvala ye-ceramic kaSt.Cera yakhelwe njengendlela ehlukile kuma-polymer O-rings ezindaweni ezibucayi lapho ama-elastomer ewohloka khona. Yakhiwe nge-99.8% i-alumina ehlanzekile kakhulu (i-Al₂O₃), le ndandatho yokuvala eqinile isetshenziswa ekusetshenzisweni kokuvala okungaguquki — ngokuvamile ehambisana ne-gasket yensimbi ethambile noma ye-graphite — ukuhlinzeka nge-vacuum noma igesi ethembekile emazingeni okushisa afinyelela ku-800°C nasezindaweni ezinolaka ze-plasma noma zamakhemikhali. Izinto ezibonakalayo azinawo umoya ophumayo, amandla aphezulu okucindezela (amandla angaphansi kwe-flexural 361 MPa), kanye nokungasebenzi kahle kwamakhemikhali (okumelana nama-halogen, ama-acid, nama-alkali ngaphandle kwe-HF). Izindawo zokuvala ezihambisana kahle (ukuthamba ≤5 μm, ukugoba kobuso i-Ra ≤0.2 μm) ziqinisekisa ukuthintana okuqinile nokuvuza nezinsimbi zokuhlangana noma izingxenye ze-ceramic.
Imininingwane(kusekelwe ku-99.8% Al₂O₃):
| Impahla | Inani |
| Izinto | I-Alumina engu-99.8% (Ivory) |
| Ubuningi | 3.93 g/cm³ |
| Ukumuncwa Kwamanzi | 0% |
| Amandla Okugobeka | 361 MPa |
| Amandla Okucindezela (kucatshangwa) | >2000 MPa |
| Ukuqina kukaVickers | 16 GPa |
| Ukwanda Kokushisa (25–1000°C) | 7.2×10⁻⁶/℃ |
| Izinga Lokushisa Eliphezulu Lokusebenza | 800°C (umoya), 1600°C (ongaqinile) |
| Ukuqeda Komphezulu (ukuvala ubuso) | I-Ra ≤0.2 μm (igobile) |
| Ukuthamba (ngama-25 mm) | ≤5 μm |
| Izinga Lokuvuza Kwe-Helium | <1×10⁻¹⁰ I-Pa·m³/s (ene-gasket efanele) |
Izicelo:
- · Izimbozo ezimile zegumbi lenqubo ye-semiconductor (i-CVD, i-PVD, i-etch)
- · Izivalo zeminyango yesithando somlilo ezishisa kakhulu
- · Ama-flange okuhambisa amanzi nge-vacuum
- · Ukuvalwa kwemikhumbi ye-reactor yamakhemikhali
Inqubo Yokukhiqiza:
Ukucindezela kwe-isostatic → ukuthulula ku-1600°C → ukugoqa okuqondile okunezinhlangothi ezimbili ukuze kufezwe ubuso obubushelelezi, obuyisicaba kakhulu → ukugoqa okusemaphethelweni → ukuhlanza nge-ultrasonic. Indandatho ngayinye ihlolwe ukuvuza okungu-100% kusitholi sokuvuza se-helium esine-gasket yensimbi ejwayelekile.
Ikhwalithi yokulawula:
- · Ukuhlolwa kobukhulu be-CMM (ID, OD, ukujiya, ukufana)
- · Iphrofayili yobuso be-Ra kanye ne-waviness
- · Ukulinganisa ukuthamba kusetshenziswa i-optical flat
- · Ukuhlolwa kokuvuza kwe-Helium (indlela yokucindezela emuva)
Izinzuzo ngaphezu kwama-Polymer O-rings:
- Imelana no-800°C vs. <300°C ye-FFKM
- · Akukho ugesi ophumayo — akukho ukungcoliswa kwendawo engcolile
- · Ayimelani nazo zonke izinhlobo zamakhemikhali e-plasma (i-fluorine, i-chlorine, i-oxygen)
- · Akukho sethi yokucindezelwa noma ukuguqulwa okuhlala njalo
- · Impilo yesevisi engenamkhawulo ezindaweni ezihlanzekile
Imikhawulo (Amazwana Abalulekile):
- · Akuyona i-O-ring— iyindandatho eqinile ye-ceramic edinga i-gasket ethambile (ithusi, i-aluminium, noma i-graphite) ukuze ivalwe.
- · Ayivumeli ukunyakaza okuguqukayo noma ukungahambisani kahle kwe-flange enkulu.
- · Izindleko zokuqala eziphezulu kunezindandatho ze-polymer O, kodwa isikhathi eside sokuphila kunciphisa izindleko zobunikazi.
- · Isiphatho esithambile — ngokunakekela; gwema ukushayisana noma ukucindezeleka kokugoba.
Qaphela:Idatha engenhla ilandela ngokuqinile ithebula lempahla ye-Al₂O₃ elinikeziwe. Akukho datha yezinto ze-elastomeric enikeziwe. Lo mkhiqizo uyindandatho yokuvala engaguquki, akuyona indandatho ye-elastomeric O-ring. Sicela uqinisekise ukuthi lokhu kuyahlangabezana yini nezidingo zakho zesicelo.
