Ipuleti le-Ceramic le-Alumina elihlanzekile kakhulu – lokufaka izinto zokuvikela ukushisa kanye nokushisa okuphezulu
Ipuleti lika-ceramic likaSt.Cera lenziwe nge-alumina engu-99.8% ehlanzekile kakhulu (Al₂O₃), enikeza amandla aphezulu e-dielectric (15×10⁶ V/m), ukuzinza kokushisa kufika ku-1600°C, kanye nokumelana okuhle kakhulu nokuguguleka. Amapuleti ahlanganiswe ngokunemba ukuze afinyelele ukuthamba okungu-≤5 μm ngaphezu kuka-100 mm kanye nokungagugi kobuso okungu-Ra ≤0.4 μm. Itholakala ngobukhulu obujwayelekile kusukela ku-1 mm kuya ku-20 mm, osayizi abangokwezifiso kufika ku-500×500 mm. Isetshenziswa njengezivikeli zikagesi, izisekelo ze-heater, ama-chamber liners, kanye nama-vacuum chuck substrates.
Imininingwane (ngokusekelwe ku-99.8% Al₂O₃):
| Impahla | Inani |
| Izinto | I-Alumina engu-99.8% (Ivory) |
| Ubuningi | 3.93 g/cm³ |
| Amandla Okugobeka | 361 MPa |
| Amandla e-Dielectric | 15×10⁶ V/m |
| Ukumelana Okuqondile | >10¹⁴ Ω·mm²/m |
| Ukuqhuba Okushisayo | 32 W/m·k |
| Ukwanda Kokushisa (25-1000°C) | 7.2×10⁻⁶/℃ |
| Izinga Lokushisa Eliphezulu Lokusebenza | 1600°C |
| Ukuthamba (ngamamilimitha ayi-100) | ≤5 μm |
| Ukubekezelela Ubukhulu | ±0.05 mm |
| Ubulukhuni Bomphezulu | URa ≤0.4 μm |
Izicelo:
- · Amapuleti okushisa kagesi emishinini enamandla aphezulu
- · Amapuleti okusekela i-heater ezithandweni zokusabalalisa
- · Ama-chamber liner e-CVD/PVD
- · Amapuleti esisekelo sama-vacuum chucks
Izinzuzo:
- · Ukumuncwa kwamanzi okungu-0% – akukho ukukhishwa kwegesi ku-vacuum
- · Ayisebenzi ngamakhemikhali – imelana nama-acid nama-halogen (ngaphandle kwe-HF)
Ukwenza ngokwezifiso:
Imigodi, iziqeshana, ukuzungeza imiphetho, kanye nokwenza insimbi kuyatholakala.
